JPH0276842U - - Google Patents
Info
- Publication number
- JPH0276842U JPH0276842U JP15620688U JP15620688U JPH0276842U JP H0276842 U JPH0276842 U JP H0276842U JP 15620688 U JP15620688 U JP 15620688U JP 15620688 U JP15620688 U JP 15620688U JP H0276842 U JPH0276842 U JP H0276842U
- Authority
- JP
- Japan
- Prior art keywords
- plate
- support unit
- sides
- positioning
- support
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 125000006850 spacer group Chemical group 0.000 claims description 5
- 230000037431 insertion Effects 0.000 claims 3
- 238000003780 insertion Methods 0.000 claims 3
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Pile Receivers (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15620688U JPH062273Y2 (ja) | 1988-11-30 | 1988-11-30 | 板状体の収納カセット |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15620688U JPH062273Y2 (ja) | 1988-11-30 | 1988-11-30 | 板状体の収納カセット |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0276842U true JPH0276842U (en]) | 1990-06-13 |
| JPH062273Y2 JPH062273Y2 (ja) | 1994-01-19 |
Family
ID=31434536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15620688U Expired - Lifetime JPH062273Y2 (ja) | 1988-11-30 | 1988-11-30 | 板状体の収納カセット |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH062273Y2 (en]) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101125011B1 (ko) * | 2009-07-09 | 2012-03-27 | 주식회사 선익시스템 | 기판 정렬용 핀세트, 기판 정렬 장치 및 이를 포함하는 박막 증착 장치 |
-
1988
- 1988-11-30 JP JP15620688U patent/JPH062273Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101125011B1 (ko) * | 2009-07-09 | 2012-03-27 | 주식회사 선익시스템 | 기판 정렬용 핀세트, 기판 정렬 장치 및 이를 포함하는 박막 증착 장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH062273Y2 (ja) | 1994-01-19 |